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Furnace-Sliding CVD System for Continuous CNT Forest Synthesis
Overview： Long-quartz-tube and furnace-sliding CVD system was fabricated for continuously growing vertically-aligned CNT forests on Zr or Cu foils, which are used as thermal conduction TIM (Thermal Interface Material) devices.
Characteristic：
- Zr foils, as many as possible, are set in advance in the long quartz tube on a line.
- The furnace is moved, driven by a motor, along the quartz tube in a constant velocity, and the samples are CVD treated continuously and sequentially.
- Compared to batch CVD, the heat up time and cooling time for each batch are saved, leading to a large shortening of process time.
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