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MPCVD-Slide Continuous CVD for Mass production
Outline: The CVD system is designed for realizing mass-production by equipping a sliding furnace and a long reaction quartz tube (our original idea). A large amount of samples are set previously in the long reaction tube and then the furnace is continuously mowing along the quartz tube driven by motor, so that all samples are continuously CVD threated under the same CVD conditions.
Features:
- Perfectly uniform coating is achieved at all positions, without depending on upper stream or lower stream.
- Motor-driven sliding control unit and sliding speed is adjustable.
- Easy collection of treated sample without loss.