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MPCVD-ZnO Easy synthesis of Nano wires of ZnO
Purpose: A furnace type of thermal CVD system for the formation of ZnO nanorods on substrates.
Features:
- Process conditions and system design are based on our uniquely developed growth mechanism.
- Vertically aligned ZnO nanorods can be grown on sapphire or Si substrates.
- Compact size, steady chassis
Specifications
| Configuration |
Tubular Furnace |
Operating Temp. |
400～1000℃ |
| Control of Temperature |
1zone Program Control |
| Dimension |
W300㎜×H200㎜×D186㎜ |
| Electric Capacitance |
500W |
| Furnace Tube |
Materia |
Quartz |
| Dimension |
OD30㎜×ID26㎜×L750㎜ |
| Control of Gases |
Gas Flowmeter |
| Introduced Gases |
Carrier Gas：N2 or Ar
Oxidation Gas：O2 |
| Vacuum Gauge |
Bourdon Gauge |
| Vacuum Pump |
Oil-sealed Rotary Vacuum Pump |
| Dimension |
W156㎜×H200㎜×D300㎜ |
| Quartz Boat |
| Dimension |
W900㎜×H600㎜×D500㎜ |