Ion Beam Analysis End Station

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The NEC RC43 Analysis End station combines several complementary materials analysis ion beam techniques with automation software to yield a fast, complete, and verified materials analysis answer to your unknown targets. The analytical techniques include Rutherford Backscattering (RBS) with Channeling, Elastic Recoil Detection (ERD), Particle Induced X-Rays (PIXE), and Nuclear Reaction Analysis (NRA). In one data collection pass all elements can be identified and depth profiled. The software allows all the techniques to be simultaneously live. Also, the RC43 generates mappings of surface elemental concentrations and crystal structure as images yielding a true 3D analysis (below).

Inside the high vacuum chamber you can see the detectors, beam collimation, filters, and target positioning device. The chamber is electrically isolated and made of a mono elemental metal to eliminate or reduce background noise. Filter and sample positioning are remotely controlled. A video camera allows the operator to position targets for analysis from the console. The target position is then put in a queue for subsequent unattended data collection. A group of targets can be changed in only a few minutes through a load lock. Easy and safe use of load lock valves, etc. is accomplished by a vacuum interlock controller.