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We provide the essential equipment for your Ion Beam Sputter (IBS) system. We have many sizes of ion beam sources with a large number of interface possibilities. Your choices for beam creation include radio frequency (RF) and filament-driven (DC) styles of production type ion beam sources.
In addition, source operation is easy with our I-BEAM power supply family. The RF and DC electronics provide reliable operation for the most demanding production environments. In some cases, our I-BEAM works well in legacy equipment.
Finally, our ion beam grid assemblies, or ion optics, are carefully constructed using molybdenum, graphite, or titanium and are available in a variety of shapes and sizes.
You will also find in our equipment catalog we carry a healthy assortment of spare parts including discharge chambers, insulators and many other items to keep your source up and running.
If you are unsure of your selection, visit our Sales Literature section first.
HIGH PERFORMANCE RF SOURCES
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