CVD process gas analytical apparatus: MP-Qmass

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                                                                                                                    MP-Qmass

Purpose:    This is a quadrupole mass spectrometer for analyzing CVD process gases or residual gases. It will be useful to clarifying mechanisms of CVD processes or chemical reactions by analyzing the generated gases.
 We will customize the apparatus in order to meet to your existing systems and request

                                                                   

                                                                                      spectrum of residual toluene in air

Specifications

Quadrupole Mass Spectrometer

Differential Pumping System

PC for Sampled Data Management