MBE - SMART NanoFab MBE System

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SMART NanoFab MBE System
Versatile Compact Research System

SVT Associates' SMART NanoFab MBE system is the perfect combination of small footprint and large capability. The table-top UHV chamber includes a series of ports to accommodate a wide selection of deposition sources and process monitoring tools.

SMART NanoFab MBE Applications

  • III-V
  • II-VI
  • II-Oxides
  • III-Nitrides
  • Multi-Technique Deposition MBE

SMART NanoFab MBE Equipment Options

  • Load Lock for rapid sample exchange
  • RF Plasma Source
  • Deposition Sources
  • In-Situ Process Monitoring Tools

Deposition Sources and Monitoring Tools

  • Effusion Cells
  • RF Plasma Source
  • Gas Injection
  • RHEED and RHEED Image Analysis Software
  • AccuFlux In-Situ Process Monitor
  • Quartz Crystal Monitor
  • Linear Flux Monitor for Calibration

SMART NanoFab MBE System

 

  SMART NanoFab MBE Product Sheet   SMART NanoFab MBE Options