Thin Film Process Monitoring

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Thin Film Process Monitoring

AccuTemp™
Advanced System for Real-time Measurement of Substrate Temperature, Growth Rate, and Film Index of Refraction During MBE and MOCVD Thin Film Growth.

                         AccuTemp

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AccuFlux™

Turn-Key System for Real-Time deposition Flux Monitoring and Composition Control During Thin Film Deposition Processes.

                                   AccuFlux

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RHEED

RHEED Image Analysis Software for Diffraction Studies, Strain Analysis, and Growth Rate Measurement to Optimize Material Quality During Deposition

                       

                                RHEED Electron Gun                                                                             Video RHEED

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In-Situ Cathodoluminescence

Real-time Measurement of Composition, Optical Quality and Doping Level of Nitride and Oxide Material During Thin Film Deposition.

                               CL Detector