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Thin Film Process Monitoring
AccuTemp™
Advanced System for Real-time Measurement of Substrate Temperature, Growth Rate, and Film Index of Refraction During MBE and MOCVD Thin Film Growth.
AccuTemp
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AccuFlux™
Turn-Key System for Real-Time deposition Flux Monitoring and Composition Control During Thin Film Deposition Processes.
AccuFlux
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RHEED
RHEED Image Analysis Software for Diffraction Studies, Strain Analysis, and Growth Rate Measurement to Optimize Material Quality During Deposition
RHEED Electron Gun Video RHEED
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In-Situ Cathodoluminescence
Real-time Measurement of Composition, Optical Quality and Doping Level of Nitride and Oxide Material During Thin Film Deposition.
CL Detector