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Thermal CVD system for CNT synthesis [MPCVD-70] ----- JPY5,800,000~
![](../uploads/editorimages/p0105_01e.gif)
Figure of system components
Purpose: A furnace type of CVD system for synthesizing carbon nanotubes with a horizontal quartz tube furnace (diameter = 70 mm).
Features:
・Furnace heating unit and temperature controller are integrated in one unit.
・Ethanol liquid can be used as carbon source, as well as hydrocarbon gas;
good effect for SWCNT synthesis.
・Catalyst-precursor providing function is equipped;
long-length ( ~500 um) vertically-aligned CNT films and powdery CNT can be synthesized.
・3 lines of precise mass-flow gas controllers are equipped.
The use of a quartz reaction tube with a diameter of 70 mm and tube furnace as well as the increased volume of the hot zone makes it possible to produce a large amount of powder CNT (10 gram per batch), and vertically aligned CNT can be grown on a large substrate (up to 65 mm・200 m).
The shape of the furnace is different from that used in MPCVD-50, but the fundamental functions are as the same as those of MPCVD-50
Specifications
Configuration
|
Tubular Furnace
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Operating Temp.
|
400~1000℃
|
Control of Temperature
|
1zone Program Control
|
Dimension
|
W750㎜×H605㎜×D450㎜
|
Electric Capacitance
|
AC200V 20A single-phase 50/60Hz
|
Furnace Tube
|
Material
|
Quartz
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Dimension
|
OD70㎜×ID65㎜×L1200㎜
|
Control of Gases
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Mass Flow Controller
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Introduced Gases
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Carrier Gas:N2 or Ar
Reducing Gas:H2
Hydrocarbon Gas:C2H2 or C2H4 or CH4
|
Dimension(Box)
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W250㎜×H310㎜×D450㎜
|
Vacuum Gauge
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Bourdon Gauge
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Vacuum Pump
|
Oil-sealed Rotary Vacuum Pump
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Dimension
|
W156㎜×H200㎜×D300㎜
|
Feed Mechanism for Liquid Fuel
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Feed Mechanism for catalyst precursor
|