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Thermal Evaporation
PC controlled tabletop Thermal Evaporation system with a wide range of applications in organic and metal evaporation. It is a 2kVA system utilizing SCR circuitry for accurate temperature control which is crucial when evaporating organic materials. It is designed with extreme care to achieve clean, uniform, and reproducible processes on a small footprint. It provides low cost, high quality capabilities for demanding applications in R&D and low scale manufacturing.
The NTE-4000 is a stand alone version of the NTE-3000 thermal evaporator system allowing more room for additional options such as various chamber sizes, substrate cleaning and cooling, co-evaporation, and sputtering capabilities.
Features
- 12" Bell Jar / Cylindrical 10" SS / Cubical 14" SS chamber
- Up to 7"x7" plates and 200mm wafers
- Two evaporation sources
- Water cooled feedthrus
- Solid state switching for sequential evaporation
- SCR circuitry for accurate control
- Individual source and substrate shutters
- Cross contamination shields
- Quartz crystal thickness sensor
- Twist lock mechanism for easy substrate holder load/unload
- Substrate rotation
- Closed loop evaporation control
- Fully automated PC based, recipe driven
- LabVIEW user interface
- EMO protection and safety interlocks
Options
- Substrate heating up to 800°C or chilled wafer cooling
- Glancing Angle Deposition (GLAD) with rotation
- Planetary substrate holder
- Additional power module for co-evaporation
- Additional evaporation sources up to six
- RF/DC bias
- Ion source for substrate cleaning
- Magnetron source for sputtering
- MFCs for reactive sputtering/evaporation
- Automatic load/unload
- Various pumping options including cryo pumping stations
Applications
- Metallization in IC interconnects
- Metal contact layer in CIGS Applications
- Organics Field Effect Transistors
- Perovskite solar cells applications
- OLED
